First European DCG systems OptiFIB-IV installed

20 April 2008

In order to support the latest IC technology nodes in first silicon circuit edit, MASER Engineering has ordered the most advanced system for FIB based circuit modification currently on the market at DCG systems, Fremont USA. (Formerly known as Credence Diagnostics & Characterisation Group)

The current copper technology device requires new gas chemistry for the removal of metal lines and planes. The number of interconnection layers requires access to the first metal layers from the backside of the chip. The OptiFIB IV is equipped with a unique coaxial FIB/Optical column and an accurate CAD driven nanostage. Finally, the new Molybdenum metal deposition is a more accurate material than the common Platinum or Tungsten material. The powerful FIB-assist and NEXS CAD navigation tools allow the MASER engineer to access all nodes on Integrated Circuits down to the 45nm technology node.