EDX at MASER

In the first 2010 edition of the EDAX Focus (Vol. 8, No. 1), the Customer News on page 8 is fully dedicated to the EDAX systems MASER Engineering now has available for their Failure Analysis services.

Below you can read the whole story. The original document in the EDAX Focus can be downloaded here

 

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Customer News

MASER Engineering, Enschede, the Netherlands

MASER Engineering is an engineering support and service provider for the micro-electronics industry. The company’s focus is on reliability testing and physical analysis of electronic components, modules, systems, and materials.

Fabless semiconductor manufacturers continue to use more advanced sub-100 processes for their chips. Their mainstream manufacturing is subcontracted to wafer foundries and assembly and test service providers. They also have limited capabilities for device qualification and failure analysis. In 2008, MASER Engineering extended the range of sample preparation, microscopy, and fault localization tools for advanced failure analysis support on sub-100 nm devices with over 15 new systems. They now operate one of the most advanced independent F/A laboratory services in Europe.

MASER Engineering has chosen EDAX systems on all of their Scanning Electron Microscopes (SEM). The three FEI SEM’s are the Inspect S, the Nano-SEM 230 FEG, and the Quanta 3D FEG dual beam. They all have an EDAX Genesis XM2i system that include high-resolution live spectral mapping and drift correction packages.

The EDX detection is performed by the Apollo-40 Silicon Drift Detector. MASER Engineering benefits from the reduced maintenance of the Peltier cooled detector for their day-to-day  business needs. MASER Engineering also has a FEI Tecnai G² F20 XTWIN, Transmission Electron Microscope (TEM) equipped with an r-TEM detector and an integrated EDX analysis package.

MASER Engineering sees the benefits of the integration of the STEM/EDX operating interface. They are happy with the level of experience and the support they receive for training and operational questions from the local EDAX office.

The main application at MASER Engineering is the qualification and quantification of foreign materials found during the failure and construction analysis of semiconductor components. The complex mix of isolating and conductive materials with very small geometries is a challenge for the SEM/EDX systems. The results that this technology is able to provide are very important feedback for investigating yield improvement measures and filed return analysis.

The EDAX systems are very user friendly. This easy to use software interface allows them to share the SEM/EDX systems with multiple engineers and technicians. The move to the EDAX systems has allowed them to experience operational savings due to the ease of use.


For more information on the EDAX systems and EDX services at MASER Engineering, please contact Mr. Kees Revenberg, Managing Director.


Ref.: EDAX Focus 8-1 (2010) 8