FIB Device Modification at MASER

The ‘Encyclopedia of Nanoscience and NanotechnologyTM’ is the world’s first encyclopedia ever published in the field of nanotechnology. The Encyclopedia was edited by H.S. Nalwa, editor-in-chief Journal of Nanoscience and Nanotechnology, and has a foreword of R. Smalley, Nobel Prize Laureate. The first 10 volumes of the Encyclopedia were published by American Scientific Publishers in 2004.

In the chapter ‘Applications of Focused Ion Beam in Nanotechnology’ (vol. 1, p. 101-110), written by V.J. Gadgil (University of Twente, Enschede, The Netherlands) and F. Morrisey (FEI Company, The Netherlands), several applications of Focused Ion Beam (FIB) in nanotechnology are described. One of the FIB applications described in this chapter is ‘Device Modification and Prototyping’ (paragraph 5.9).

 ENN-FIB front_small.jpg    ENN-FIB CE_small.jpg

We are proud to announce that the figures that illustrate a FIB device modification in this paragraph are courtesy of MASER Engineering. This example of a FIB circuit edit was performed by our engineers using our old FEI 200 Focused Ion Beam system at that time. Since 2008, we’re performing device modifications on a new tool, a DCG systems OptiFIB-IV Focused Ion Beam system. Of course, this example from 2004 is compared to the current IC technology nodes and circuit edit possibilities completely outdated now; nevertheless, we’re honored that our images were selected as the example of a FIB device modification in an encyclopedia!

ENN-FIB CE fig11.jpg    ENN-FIB CE fig12.jpg

ENN-FIB CE fig13.jpg    ENN-FIB CE fig14.jpg

Figure 11. Cutting cias for device modification.
Figure 12. Platinum connects deposited for modification.
Figure 13. Metal lines cut by ion milling for circuit modification.
Figure 14. Modified device viewed by tilting.

 
For more information on the FIB circuit edit and other focused ion beam services at MASER Engineering, please contact Mr. Kees Revenberg or Mr. Ferdi Meijer.


Ref.: V.J. Gadgil and F. Morrissey, “Applications of Focused Ion Beam in Nanotechnology”, in Encyclopedia of Nanoscience and Nanotechnology, ed. H.S. Nalwa, vol. 1, 2004, p. 101-110